| Parameter | Characteristic | ASTM Control Method |
|---|---|---|
| Method of Growth | Cz, Fz | |
| Type/Dopant | P - Boron, N - Phosphorous, N - Antimony, N - Arsenic Undoped |
F42 |
| Orientations | <100>, <111>, <110> slice off orientations per customer's request | F26 |
| Oxygen Content | 10-19 ppmA Custom tolerances per customer's request | F121 |
| Carbon Content | < 1 ppmA Custom tolerances per customer's request | F123 |
| Resistivity ranges P - Boron, N - Phosphorous, N - Antimony, N - Arsenic Undoped |
0.001 - 50 ohm cm 0.1 - 40 ohm cm 0.01 - 0.025 ohm cm 0.001 - 0.005 ohm cm > 100 ohm cm Custom tolerances per customer's request |
F84 |
| Parameter | Prime A | Prime B | Test | ASTM Method |
|---|---|---|---|---|
| Diameter | 125 ± 0.2 mm | 125 ± 0.2 mm | 125 ± 0.5 mm | F2074 |
| Thickness | 625 ± 20 µm (standard) 381 ± 20 µm 500 ± 20 µm 675 ± 20 µm 1000 ± 20 µm |
625 ± 25 µm (standard) 381 ± 25 µm 500 ± 25 µm 675 ± 25 µm 1000 ± 25 µm |
625 ± 50 µm (standard) 381 ± 50 µm 500 ± 50 µm 675 ± 50 µm 1000 ± 50 µm |
F533 |
| TTV | < 5 µm | < 10 µm | < 15 µm | F657 |
| Bow | < 30 µm | < 30 µm | < 50 µm | F534 |
| Warp | < 30 µm | < 30 µm | < 50 µm | F657 |
| Edge Rounding | SEMI-STD or per customer's request | F928 | ||
| Marking | Primary SEMI-Flat only, SEMI-STD Flats, Notch, Round or Alternative customer's request will be considered | F847, F671 | ||
| Parameter | Prime A | Prime B | Test | ASTM Method |
|---|---|---|---|---|
| Front Side Criteria | ||||
| Surface condition | F523 | |||
| Surface Roughness | < 2 A° | < 2 A° | < 2 A° | |
| Contamination,Particles @ >0.3 µm | < 10 | < 10 | < 20 | F523 |
| Haze, Pits, Orange peel | None | None | None | F523 |
| Saw Marks, striations | None | None | None | F523 |
| Back Side Criteria | ||||
| Surface condition | F523 | |||
| Cracks, crowsfeet, saw marks,stains | None | None | None | F523 |
| Packaging | Description of bags |
|---|---|
| 3-Part Cassette, 2 Bags | Clear Gusset, A/S Blue Flat |
| Jar Tyvek Separated |