| Parameter | Characteristic | ASTM Control Method |
|---|---|---|
| Type/Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic | F42 |
| Orientations | <100>, <111> slice off orientations per customer's specifications | F26 |
| Oxygen Content | 10-18 ppmA Custom tolerances per customer's specification | F121 |
| Carbon Content | < 0.6 ppmA Custom tolerances per customer's specification | F123 |
| Resistivity ranges- P, Boron- N, Phosphorous- N, Antimony- N, Arsenic | 0.001 - 50 ohm cm 0.1 - 40 ohm cm 0.005 - 0.025 ohm cm < 0.005 ohm cm |
F84 |
| Parameter | Prime | Monitor/ Test A | Test | ASTM Method |
|---|---|---|---|---|
| Diameter | 3" ± 0.008" | 3" ± 0.008" | 3" ± 0.02" | F613 |
| Thickness | 381 ± 20 µm (standard) | 381 ± 25 µm (standard) 250 ± 25 µm 635 ± 25 µm 1000 ± 25 µm 1300 ± 25 µm | 381 ± 50 µm (standard) | F533 |
| TTV | < 5 µm | < 10 µm | < 15 µm | F657 |
| Bow | < 30 µm | < 30 µm | < 40 µm | F657 |
| Wrap | < 30 µm | < 30 µm | < 40 µm | F657 |
| Edge Rounding | SEMI-STD | F928 | ||
| Marking | SEMI-STD Flats, Primary SEMI-Flat only | F26, F671 | ||
| Parameter | Prime | Monitor/ Test A | Test | ASTM Method |
|---|---|---|---|---|
| Front Side Criteria | ||||
| Surface condition | Chemical Mechanical Polished | Chemical Mechanical Polished | Chemical Mechanical Polished | F523 |
| Surface Roughness | < 2 A° | < 2 A° | < 2 A° | |
| Contamination,Particles @ >0.3 µm | = 20 | = 20 | = 20 | F523 |
| Haze, Pits, Orange peel | None | None | None | F523 |
| Saw Marks, striations | None | None | None | F523 |
| Back Side Criteria | ||||
| Cracks, crowsfeet, saw marks,stains | None | None | None | F523 |
| Surface condition | Caustic etched | F523 | ||