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Silicon Materials Site/100mm wafers
Material Properties
| Parameter |
Characteristic |
ASTM Control Method |
| Type/Dopant |
P, Boron
N, Phosphorous
N, Antimony
N, Arsenic |
F42 |
| Orientations |
<100>, <111>
slice off orientations per customer's specifications |
F26 |
| Oxygen Content |
Intrinsic
Custom tolerances per customer's specification |
F1188 |
| Carbon Content |
< 0.5 ppmA |
F1391 |
Resistivity ranges
- P, Boron
- N, Phosphorous
- N, Antimony
- N, Arsenic |
0.001 - 50 ohm cm
0.1 - 40 ohm cm
0.005 - 0.025 ohm cm
< 0.005 ohm cm |
F84 |
Mechanical Properties
| Parameter |
Prime |
Monitor/
Test A |
Test |
ASTM Method |
Diameter
- Nominal
- Tolerance |
100
. 0.5 |
100
. 0.5 |
100
. 0.5 |
F613 |
Thickness (.m)
- Nominal
- Tolerance |
400, 525,
625, 1000
. 15, 20 |
400, 525,
625, 1000
. 25 |
400, 525,
625, 1000
. 50 |
F533 |
| TTV (.m) |
< 6 |
< 8 |
< 15 |
F657 |
| Bow (.m) |
< 20 |
< 40 |
< 40 |
F657 |
| Wrap (.m) |
< 20 |
< 40 |
< 40 |
F657 |
| Edge Rounding |
Compliant with
SEMI M1.2 Standard |
F928 |
| Primary/Secondary Flats |
Compliant with
SEMI M1.2 Standard
per customer requirement |
F26, F671 |
Surface Quality
| Parameter |
Prime |
Monitor/
Test A |
Test |
ASTM Method |
| Front Side Criteria |
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| Contamination, Particles @ >0.3 .m |
<= 10 |
<= 30 |
<= 30 |
F523 |
| Haze |
None |
None |
None |
F523 |
| Pits |
None |
None |
None |
F523 |
| Orange peel |
None |
None |
None |
F523 |
| Saw Marks, striations |
None |
None |
None |
F523 |
| Back Side Criteria |
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| Cracks, crowsfeet, saw marks, stains |
None |
None |
None |
F523 |
| Surface condition |
Caustic or acid etched |
F523 |
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