Parameter | Characteristic | ASTM Control Method |
---|---|---|
Type/Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic | F42 |
Orientations | <100>, <111> slice off orientations per customer's specifications | F26 |
Oxygen Content | 10-18 ppmA Custom tolerances per customer's specification | F121 |
Carbon Content | < 0.5 ppmA Custom tolerances per customer's specification | F123 |
Resistivity ranges- P, Boron- N, Phosphorous- N, Antimony- N, Arsenic | 0.001 - 50 ohm cm 0.1 - 40 ohm cm 0.005 - 0.025 ohm cm < 0.005 ohm cm |
F84 |
Parameter | Prime | Monitor/ Test A | Test | ASTM Method |
---|---|---|---|---|
Diameter | 100 ± 0.2 mm | 100 ± 0.2 mm | 100 ± 0.5 mm | F613 |
Thickness | 525 ± 20 µm (standard) | 525 ± 25 µm (standard) 381 ± 25 µm 625 ± 25 µm 700 ± 25 µm 800 ± 25 µm 1000 ± 25 µm 1500 ± 25 µm | 525 ± 50 µm (standard) | F533 |
TTV | < 5 µm | < 10 µm | < 15 µm | F657 |
Bow | < 30 µm | < 30 µm | < 40 µm | F657 |
Wrap | < 30 µm | < 30 µm | < 40 µm | F657 |
Edge Rounding | SEMI-STD | F928 | ||
Marking | SEMI-STD Flats, Primary SEMI-Flat only | F26, F671 |
Parameter | Prime | Monitor/ Test A | Test | ASTM Method |
---|---|---|---|---|
Front Side Criteria | ||||
Surface condition | Chemical Mechanical Polished | Chemical Mechanical Polished | Chemical Mechanical Polished | F523 |
Surface Roughness | < 2 A° | < 2 A° | < 2 A° | |
Contamination,Particles @ >0.3 µm | = 20 | = 20 | = 30 | F523 |
Haze, Pits, Orange peel | None | None | None | F523 |
Saw Marks, striations | None | None | None | F523 |
Back Side Criteria | ||||
Cracks, crowsfeet, saw marks,stains | None | None | None | F523 |
Surface condition | Caustic etched | F523 |